Ọ bụ ezie na ultrafast lasers anọwo na gburugburu ruo ọtụtụ iri afọ, ngwa mmepụta ihe amụbawo ngwa ngwa n'ime iri afọ abụọ gara aga. Na 2019, uru ahịa nke ultrafastihe lasernhazi bụ ihe dị ka nde US $ 460, yana ọnụ ọgụgụ uto kwa afọ nke 13%. Mpaghara ngwa ebe ejirila laser ultrafast nke ọma iji hazie ihe nrụpụta ụlọ ọrụ gụnyere imepụta fotomask na nrụzi na ụlọ ọrụ semiconductor yana dicing silicon, ịcha iko / ide ihe na (indium tin oxide) mwepụ ihe nkiri ITO na ngwa elektrọn ndị ahịa dị ka ekwentị mkpanaaka na mbadamba. , piston ederede maka ụlọ ọrụ ụgbọ ala, nrụpụta stent coronary na imepụta ngwaọrụ microfluidic maka ụlọ ọrụ ahụike.
01 Photomask nrụpụta na ịrụzi na ụlọ ọrụ semiconductor
A na-eji laser Ultrafast mee ihe n'otu n'ime ngwa mmepụta ihe mbụ na nhazi ihe. IBM kọrọ ngwa nke femtosecond laser ablation na mmepụta fotomask na 1990s. E jiri ya tụnyere nanosecond laser ablation, nke nwere ike ịmepụta spatter metal na mmebi iko, femtosecond laser masks na-egosi na ọ dịghị spatter metal, ọ dịghị iko mebiri, wdg uru. A na-eji usoro a emepụta sekit jikọtara ọnụ (IC). Ịmepụta mgbawa IC nwere ike ịchọ ihe ruru 30 masks na ọnụ ahịa> $100,000. Nhazi laser femtosecond nwere ike hazie ahịrị na isi n'okpuru 150nm.
Ọgụgụ 1. Nrụpụta fotomask na nrụzi
Ihe onyonyo 2. Ngosipụta kacha mma nke usoro nkpuchi dị iche iche maka oke lithography ultraviolet
02 Mbelata silicon na ụlọ ọrụ semiconductor
Silicon wafer dicing bụ usoro nrụpụta ọkọlọtọ na ụlọ ọrụ semiconductor ma a na-arụkarị ya site na iji dicing igwe. Ụkwụ ndị a na-akpụ akpụ na-etolitekarị microcracks ma na-esiri ike ibelata (dịka ọkpụrụkpụ <150 μm) wafers. Laser ọnwụ nke silicon wafers e ji mee ihe na semiconductor ụlọ ọrụ ruo ọtụtụ afọ, karịsịa maka mkpa wafers (100-200μm), na rụrụ na otutu nzọụkwụ: laser grooving, sochiri n'ibu nkewa ma ọ bụ stealth ọnwụ (ie infrared laser doo n'ime). ihe odide silicon) na-esote nkewa teepu igwe. The nanosecond pulse laser nwere ike hazie 15 wafers kwa elekere, na picosecond laser nwere ike hazie wafers 23 kwa elekere, yana ogo dị elu.
03 Ibelata iko iko na ụlọ ọrụ eletrọnịkị na-eri nri
Ihuenyo emetụ aka na ugegbe nchebe maka ekwentị mkpanaaka na laptọọpụ na-akawanye njọ ma ụfọdụ ọdịdị geometric na-agbagọ. Nke a na-eme ka usoro nhazi ọdịnala sikwuo ike. Lasers a na-ahụkarị na-emepụta àgwà ịkpụ adịghị mma, ọkachasị mgbe a na-edobe ihe ngosi iko ndị a n'ígwé 3-4 yana iko nchekwa dị elu 700 μm na-ewe iwe, nke nwere ike mebie na nrụgide mpaghara. Egosiputara lasers Ultrafast ka ha nwee ike ibelata iko ndị a na ike ihu ka mma. Maka nnukwu mbelata panel nke femtosecond, laser femtosecond nwere ike ilekwasị anya na azụ azụ nke iko ahụ, na-akpụcha n'ime iko ahụ n'emebighị ihu ihu. Enwere ike imebi iko ahụ site na iji igwe ma ọ bụ ọkụ ọkụ n'usoro akara akara.
Ọgụgụ 3. Picosecond ultrafast laser iko pụrụ iche ịkpụ
04 Piston textures na ụlọ ọrụ ụgbọ ala
A na-eji ígwè aluminom mee injin ụgbọ ala dị arọ, bụ nke na-adịghị eguzogide ike dị ka ígwè nkedo. Nnyocha achọpụtala na nhazi laser femtosecond nke textures piston ụgbọ ala nwere ike ibelata esemokwu site na 25% n'ihi na enwere ike ịchekwa irighiri ihe na mmanụ nke ọma.
Ọgụgụ 4. Femtosecond laser nhazi nke pistons engine ụgbọ ala iji melite arụmọrụ engine
05 N'ichepụta stent coronary na ụlọ ọrụ ahụike
A na-akụnye ọtụtụ nde stent nke akwara obi n'ime akwara akwara nke ahụ iji meghee ụzọ maka ọbara na-eruba n'ime arịa ndị ọzọ mechiri emechi, na-azọpụta ọtụtụ nde mmadụ kwa afọ. A na-ejikarị ígwè eme stent coronary (dịka ọmụmaatụ, igwe anaghị agba nchara, nickel-titanium shape memory alloy, ma ọ bụ cobalt-chromium alloy na nso nso a) ntupu waya nwere obosara strut nke ihe dịka 100 μm. Tụnyere ogologo-pulse laser ọnwụ, uru nke iji ultrafast lasers bee brackets bụ elu ịkpụ mma, mma elu imecha, na obere irighiri ihe, nke na-ebelata post-processing efu.
06 Ngwa Microfluidic maka ụlọ ọrụ ahụike
A na-ejikarị ngwaọrụ microfluidic na ụlọ ọrụ ahụike maka nyocha na nyocha ọrịa. A na-arụpụtakarị ihe ndị a site na ịkpụzi micro-injection nke akụkụ nke ọ bụla wee jikọta ya site na iji gluing ma ọ bụ ịgbado ọkụ. Ngwakọta laser Ultrafast nke ngwaọrụ microfluidic nwere uru nke imepụta microchannels 3D n'ime ihe ndị na-ahụ anya dị ka iko na-enweghị mkpa njikọ. Otu ụzọ bụ imepụta laser ultrafast n'ime nnukwu iko na-esochi mmiri kemịkalụ etching, nke ọzọ bụ ablation nke femtosecond laser n'ime iko ma ọ bụ rọba n'ime mmiri a gbanyere agbaze iji wepụ irighiri ihe. Ụzọ ọzọ bụ ịgbanye ọwa igwe n'ime elu iko ma jiri mkpuchi enyo mechie ha site na ịgbado ọkụ femtosecond laser.
Ọgụgụ 6. Femtosecond laser na-ebute etching nhọrọ iji kwadebe ọwa microfluidic n'ime ihe iko.
07 Micro mkpọpu mmiri nke injector nozzle
Femtosecond laser microhole machining dochie micro-EDM n'ọtụtụ ụlọ ọrụ n'ahịa injector nrụgide dị elu n'ihi mgbanwe dị ukwuu na-agbanwe profaịlụ oghere oghere na oge nhazi dị mkpụmkpụ. Ikike ijikwa ọnọdụ elekwasị anya na-akpaghị aka na tilt nke doo site na isi nyocha nke bu ụzọ butere imepụta profaịlụ oghere (dịka ọmụmaatụ, gbọmgbọm, ọkụ, njikọta, iche) nke nwere ike ịkwalite atomization ma ọ bụ ịbanye n'ime ụlọ combustion. Oge ịkwọ ụgbọ mmiri na-adabere na olu nke ablation, na ọkpụrụkpụ nke 0.2 - 0.5 mm na oghere oghere nke 0.12 - 0.25 mm, na-eme ka usoro a dị okpukpu iri karịa micro-EDM. A na-eme microdrilling n'ọkwa atọ, gụnyere imechi na imecha oghere ndị na-anya ụgbọelu. A na-eji argon dị ka gas inyeaka iji kpuchido olulu mmiri site na oxidation na iji chebe plasma ikpeazụ n'oge mbido mbụ.
Ọgụgụ 7. Femtosecond laser nhazi nkenke nkenke nke oghere taper na-atụgharị maka injector engine diesel
08 Ultra-ngwa ngwa laser ederede
N'ime afọ ndị na-adịbeghị anya, iji meziwanye nhazi nhazi, belata mmebi ihe onwunwe, na ịbawanye arụmọrụ nhazi, ubi micromachining ejirila nwayọọ nwayọọ na-elekwasị anya nke ndị nchọpụta. Ultrafast laser nwere uru nhazi dị iche iche dị ka mmebi dị ala na nkenke dị elu, nke aghọwo ihe na-elekwasị anya n'ịkwalite mmepe nke teknụzụ nhazi. N'otu oge ahụ, ultrafast lasers nwere ike ime ihe dị iche iche, na laser nhazi ihe mmebi bụkwa isi ntụziaka nyocha. A na-eji laser Ultrafast eme ihe iji kpochapụ ihe. Mgbe njupụta ike nke laser dị elu karịa ọnụ ụzọ nkwụsị nke ihe ahụ, elu nke ihe a na-ekpochapụ ga-egosi nhazi micro-nano nwere ụfọdụ njirimara. Nnyocha na-egosi na nke a pụrụ iche n'elu Structure bụ a nkịtị onu na-eme mgbe laser nhazi ihe. Nkwadebe nke ihe owuwu micro-nano elu nwere ike imeziwanye njirimara nke ihe ahụ n'onwe ya ma mee ka ịmepụta ihe ọhụrụ. Nke a na-eme ka nkwadebe nke elu micro-nano owuwu site ultrafast laser a teknuzu usoro na mkpa mmepe pụtara. Ugbu a, maka metal ihe, nnyocha na ultrafast laser elu texturing nwere ike melite metal elu wetting Njirimara, melite elu esemokwu na-eyi Njirimara, welie mkpuchi mkpuchi, na directional proliferation na adhesion nke mkpụrụ ndụ.
Ọgụgụ 8. Njirimara Superhydrophobic nke elu silicon akwadoro laser
Dị ka nkà na ụzụ na-emepụta ihe na-emepụta ihe, nhazi laser ultrafast nwere àgwà nke obere mpaghara okpomọkụ na-emetụta, usoro na-abụghị usoro nke mmekọrịta na ihe, na nhazi mkpebi dị elu karịa njedebe diffraction. Ọ nwere ike ghọta nhazi micro-nano dị elu na nkenke nke ihe dị iche iche. na imepụta ihe owuwu micro-nano akụkụ atọ. Ị nweta laser n'ichepụta ihe pụrụ iche, ihe mgbagwoju anya na ngwaọrụ pụrụ iche na-emepe ụzọ ọhụrụ maka mmepụta micro-nano. Ka ọ dị ugbu a, a na-eji laser femtosecond eme ihe n'ọtụtụ ebe sayensị: femtosecond laser nwere ike iji kwadebe ngwa anya dị iche iche, dị ka microlens arrays, bionic compound eyes, optical waveguides na metasurfaces; na-eji nkenke ya dị elu, mkpebi dị elu na Site na ikike nhazi akụkụ atọ, femtosecond laser nwere ike ịkwadebe ma ọ bụ jikọta microfluidic na optofluidic ibe dị ka microheater components na ọwa microfluidic akụkụ atọ; na mgbakwunye, femtosecond laser nwekwara ike kwadebe ụdị dị iche iche nke elu micro-nanostructures iji nweta mgbochi echiche , mgbochi echiche, super-hydrophobic, mgbochi icing na ọrụ ndị ọzọ; Ọbụghị naanị nke ahụ, etinyekwara laser femtosecond n'ọhịa nke biomedicine, na-egosi arụmọrụ pụtara ìhè n'ubi dị ka micro-stent nke ndu, mkpụrụ ndụ ọdịbendị cell na onyonyo microscopic nke ndụ. Atụmanya ngwa ngwa. Ka ọ dị ugbu a, mpaghara ngwa nke nhazi laser femtosecond na-agbasawanye kwa afọ. Na mgbakwunye na nke a kpọtụrụ aha n'elu micro-optics, microfluidics, multi-functional micro-nanostructures na biomedical engineering ngwa, ọ na-ekerekwa òkè dị ukwuu na mpaghara ụfọdụ na-apụta, dị ka nkwadebe metasurface. , Micro-nano n'ichepụta na nchekwa ozi anya ọtụtụ akụkụ, wdg.
Oge nzipu: Eprel-17-2024
