Ọ bụ ezie na lasers ultrafast adịla kemgbe ọtụtụ iri afọ, ngwa ụlọ ọrụ etolitela ngwa ngwa n'ime afọ iri abụọ gara aga. Na 2019, uru ahịa nke ultrafast.ihe laserNhazi ahụ dị ihe dị ka nde dọla US$460, yana mmụba kwa afọ nke 13%. Ebe eji lasers eme ihe nke ọma iji hazie ihe ụlọ ọrụ gụnyere imepụta ihe mkpuchi foto na ndozi na ụlọ ọrụ semiconductor yana ịkpụ silicon, ịkpụ/ide ihe iko na iwepụ ihe nkiri ITO (indium tin oxide) na ngwa eletrọniki ndị ahịa dịka ekwentị mkpanaaka na mbadamba, nhazi piston maka ụlọ ọrụ ụgbọ ala, imepụta stent coronary na imepụta ngwaọrụ microfluidic maka ụlọ ọrụ ahụike.
01 Mmepụta na ndozi fotomask na ụlọ ọrụ semiconductor
E jiri lasers Ultrafast mee ihe n'otu n'ime ngwa ụlọ ọrụ kacha ochie n'ihe gbasara nhazi ihe. IBM kọrọ na e jiri femtosecond laser ablation mee ihe n'ime mmepụta ihe mkpuchi foto na afọ 1990. Ma e jiri ya tụnyere nanosecond laser ablation, nke nwere ike ime ka ígwè gbasaa na mmebi iko, ihe mkpuchi laser femtosecond anaghị egosi ihe mkpuchi metal, enweghị mmebi iko, wdg. Uru ya. A na-eji usoro a emepụta sekit agbakwunyere (ICs). Imepụta chip IC nwere ike ịchọ ihe mkpuchi ruo 30 ma ọ ga-eri ihe karịrị $100,000. Nhazi laser Femtosecond nwere ike ịhazi ahịrị na isi ihe dị n'okpuru 150nm.
Foto 1. Mmepụta na ndozi ihe mkpuchi foto
Foto nke 2. Nsonaazụ nhazi nke ụdị ihe mkpuchi dị iche iche maka oke ultraviolet lithography
02 Ịcha silicon na ụlọ ọrụ semiconductor
Ịkpụ waya silicon bụ usoro nrụpụta a na-ahụkarị n'ụlọ ọrụ semiconductor, a na-ejikwa ịkpụ waya mekaniki eme ihe. Wiil ndị a na-akpụ waya na-emepụta obere mgbawa ma na-esi ike ịkpụ obere (dịka ọmụmaatụ, ọkpụrụkpụ ihe dị ka 150 μm). A na-eji ịkpụ waya silicon mee ihe n'ụlọ ọrụ semiconductor ruo ọtụtụ afọ, ọkachasị maka wafer dị gịrịgịrị (100-200 μm), a na-emekwa ha n'ọtụtụ usoro: ịkụ waya laser, nke na-esochi nkewa mekaniki ma ọ bụ ịkpụ waya stealth (ya bụ, infrared laser beam n'ime silicon scribing) nke na-esochi nkewa tepụ mekaniki. Laser nanosecond pulse nwere ike ịhazi wafer 15 kwa elekere, laser picosecond nwekwara ike ịhazi wafer 23 kwa elekere, yana mma dị elu.
03 Ịcha/ide ihe n'ime ụlọ ọrụ eletrọniki a na-ere ere
Ihuenyo mmetụ aka na iko nchekwa maka ekwentị mkpanaaka na laptọọpụ na-adị gịrịgịrị, ụfọdụ ọdịdị geometric na-agbagọkwa agbagọ. Nke a na-eme ka ịkpụ igwe ọdịnala sie ike karị. Laser nkịtị na-emepụtakarị mma ịkpụ adịghị mma, karịsịa mgbe a na-etinye ihe ngosi iko ndị a n'ime akwa 3-4 ma tinye iko nchebe dị n'elu 700 μm dị nro, nke nwere ike ịgbaji na nrụgide mpaghara. Egosipụtala na lasers Ultrafast nwere ike ịkpụ iko ndị a n'ike ka mma. Maka nnukwu ịkpụ panel dị larịị, enwere ike ilekwasị anya na laser femtosecond n'elu azụ nke mpempe iko ahụ, na-akụcha ime iko ahụ n'emebighị elu ihu. Mgbe ahụ, enwere ike ịgbaji iko ahụ site na iji usoro igwe ma ọ bụ okpomọkụ dịka ụkpụrụ akara si dị.
Foto nke 3. Picosecond ultrafast laser glass cut special shaped special shaped
04 Ụdị Piston n'ime ụlọ ọrụ ụgbọ ala
E ji aluminom alloys mee injin ụgbọala dị mfe, nke na-anaghị eguzogide iyi dị ka ígwè a kpụrụ akpụ. Nnyocha achọpụtala na nhazi laser femtosecond nke udidi piston ụgbọala nwere ike ibelata esemokwu ruo 25% n'ihi na enwere ike ịchekwa ihe mkpofu na mmanụ nke ọma.
Foto nke 4. Nhazi laser Femtosecond nke piston injin ụgbọala iji melite arụmọrụ injin
05 Ịrụpụta stent akwara obi na ụlọ ọrụ ahụike
A na-etinye ọtụtụ nde stents akwara obi n'ime akwara obi iji mepee ọwa ka ọbara na-asọba n'ime arịa ọbara ndị kpụkọrọ akpụkọ, na-azọpụta ọtụtụ nde mmadụ kwa afọ. A na-ejikarị ígwè (dịka ọmụmaatụ, ígwè anaghị agba nchara, nickel-titanium shape memory alloy, ma ọ bụ cobalt-chromium alloy) eme stents akwara obi nke nwere obosara strut nke ihe dị ka 100 μm. Ma e jiri ya tụnyere ịkpụ laser ogologo-pulse, uru nke iji lasers ultrafast bee brackets bụ ịdị mma dị elu, imecha elu ka mma, na obere ihe mkpofu, nke na-ebelata ọnụ ahịa nhazi mgbe emechara.
06 Mmepụta ngwaọrụ Microfluidic maka ụlọ ọrụ ahụike
A na-ejikarị ngwaọrụ microfluidic eme ihe n'ụlọ ọgwụ maka nnwale na nchọpụta ọrịa. A na-emepụta ha site na iji obere injection molding nke akụkụ dị iche iche wee jikọta ha site na iji gluing ma ọ bụ welding. Imepụta ngwaọrụ microfluidic laser dị oke ọsọ nwere uru nke imepụta obere ọwa 3D n'ime ihe ndị doro anya dị ka iko na-enweghị mkpa njikọ. Otu ụzọ bụ imepụta laser dị oke ọsọ n'ime iko buru ibu, nke na-esote ya bụ ihe e ji kemịkalụ mmiri mee, nke ọzọ bụ ablation laser femtosecond n'ime iko ma ọ bụ plastik n'ime mmiri a gwakọtara agwakọta iji wepụ ihe ndị mebiri emebi. Ụzọ ọzọ bụ iji igwe tinye ọwa n'ime iko ma mechie ha na mkpuchi iko site na ịgbado ọkụ laser femtosecond.
Foto nke 6. Femtosecond laser na-akpalite ihe ịchọ mma iji kwadebe ọwa microfluidic n'ime ihe iko.
07 Ngwuputa obere ihe ntụtụ nke ihe ntụtụ
Ngwunye obere oghere laser Femtosecond ejirila obere EDM dochie obere EDM n'ọtụtụ ụlọ ọrụ dị na ahịa injector dị elu n'ihi mgbanwe dị ukwuu na mgbanwe profaịlụ oghere mmiri na oge nhazi dị mkpụmkpụ. Ike ijikwa ọnọdụ lekwasị anya na ntụgharị nke ogwe ahụ site na isi nyocha precessing emeela ka e nwee nhazi nke profaịlụ oghere (dịka ọmụmaatụ, gbọmgbọm, ọkụ, njikọta, ọdịiche) nke nwere ike ịkwalite atomization ma ọ bụ ịbanye n'ime ụlọ ọkụ. Oge igwu ala dabere na olu ablation, yana ọkpụrụkpụ olulu nke 0.2 - 0.5 mm na dayameta oghere nke 0.12 - 0.25 mm, na-eme ka usoro a dị ngwa karịa obere EDM ugboro iri. A na-eme microdrilling na ọkwa atọ, gụnyere roughing na mmecha nke oghere site na pilot. A na-eji Argon dị ka gas enyemaka iji chebe olulu mmiri ahụ pụọ na oxidation na iji chebe plasma ikpeazụ n'oge mbido.
Foto nke 7. Nhazi dị elu nke oghere taper agbagọ maka injector injin dizel nke Femtosecond laser
08 Ụdị laser dị oke ọsọ
N'afọ ndị na-adịbeghị anya, iji melite izi ezi nke igwe, belata mmebi ihe, na ịbawanye arụmọrụ nhazi, ngalaba nke micromachining aghọọla ihe ndị nchọpụta na-elekwasị anya. Ultrafast laser nwere uru nhazi dị iche iche dịka obere mmebi na oke nkenke, nke abụrụla isi ihe na-akwalite mmepe nke teknụzụ nhazi. N'otu oge ahụ, ultrafast lasers nwere ike ime ihe na ọtụtụ ihe, mmebi ihe nhazi laser bụkwa isi ihe nyocha. A na-eji Ultrafast laser eme ihe iji wepụ ihe. Mgbe njupụta ike nke laser dị elu karịa oke iwepụ ihe ahụ, elu nke ihe a gbapụrụ agbapụ ga-egosi nhazi micro-nano nwere ụfọdụ njirimara. Nnyocha na-egosi na Nhazi elu pụrụ iche a bụ ihe a na-ahụkarị mgbe ihe nhazi laser. Nkwadebe nke ihe owuwu micro-nano elu nwere ike imeziwanye njirimara nke ihe ahụ n'onwe ya ma mee ka mmepe nke ihe ọhụrụ dị. Nke a na-eme ka nkwadebe nke ihe owuwu micro-nano elu site na ultrafast laser bụrụ usoro teknụzụ nwere mkpa mmepe dị mkpa. Ugbu a, maka ihe ndị e ji ígwè mee, nnyocha gbasara otú e si eji laser eme ihe nke ọma nwere ike ime ka mmiri dị n'elu ígwè ka mma, melite esemokwu elu na iyi, mee ka mpịachi mkpuchi dịkwuo mma, na mmụba na njikọta nke mkpụrụ ndụ.
Foto nke 8. Njirimara superhydrophobic nke elu silicon nke laser kwadebere
Dịka teknụzụ nhazi kachasị ọhụrụ, nhazi laser dị oke ọsọ nwere njirimara nke obere mpaghara emetụtara okpomọkụ, usoro mmekọrịta na ihe na-abụghị ahịrị, na nhazi mkpebi dị elu karịa oke diffraction. Ọ nwere ike imezu nhazi micro-nano dị elu na nke ziri ezi nke ihe dị iche iche. na imepụta nhazi micro-nano atọ. Imezu mmepụta laser nke ihe pụrụ iche, nhazi mgbagwoju anya na ngwaọrụ pụrụ iche na-emepe ụzọ ọhụrụ maka imepụta micro-nano. Ugbu a, ejirila laser femtosecond mee ihe nke ukwuu n'ọtụtụ ngalaba sayensị kachasị ọhụrụ: enwere ike iji laser femtosecond kwadebe ngwaọrụ anya dị iche iche, dị ka microlens arrays, bionic compound eyes, optical waveguides na metasurfaces; site na iji nkenke ya dị elu, mkpebi dị elu na Site na ikike nhazi atọ, laser femtosecond nwere ike ịkwadebe ma ọ bụ jikọta chips microfluidic na optofluidic dị ka ihe ndị dị na microheater na ọwa microfluidic atọ; Na mgbakwunye, femtosecond laser nwekwara ike ịkwadebe ụdị micro-nanostructures dị iche iche iji nweta mgbochi ntụgharị uche, mgbochi ntụgharị uche, super-hydrophobic, mgbochi icing na ọrụ ndị ọzọ; ọ bụghị naanị nke ahụ, etinyere femtosecond laser n'ọhịa biomedicine, na-egosi arụmọrụ pụrụ iche n'ọhịa dịka micro-stent bayọlọji, substrates culture cell na bio microscopic imaging. Atụmanya ngwa sara mbara. Ugbu a, ubi ngwa nke nhazi laser femtosecond na-agbasa kwa afọ. Na mgbakwunye na micro-optics, microfluidics, multi-functional micro-nanostructures na ngwa injinia biomedical, ọ na-arụkwa ọrụ dị ukwuu na ụfọdụ ubi na-apụta, dị ka nkwadebe metasurface. , mmepụta micro-nano na nchekwa ozi anya dị iche iche, wdg.
Oge ozi: Eprel-17-2024
